Vacuum Technology for Particle Accelerators

Vacuum technology
 for particle accelerators
 C. Benvenuti, CERN (honorary staff member)
1
Cogne meeting, February 2020
Lesson 1:     Introduction
                      The Intersecting Storage Rings (ISR)
 
Lesson 2:     Getter pumping
                      The Large Electron Positron collider (LEP)
                      The Large Hadron Collider (LHC)
                      An alternative solution
                      Conclusions
2
Cogne meeting, February 2020
Cogne meeting, February 2020
3
Otto von Guericke’s first pneumatic vacuum pump (1654)
Cogne meeting, February 2020
4
Introduction
Particles circulating in accelerators may get lost by electronic and nuclear
collisions with the residual gas molecules
The particle loss depends on the interaction cross sections for the different
gases and on gas densities
The vacuum requirements are more stringent for storage rings, where the
particles are kept circulating for hours or days, than for accelerators, where
the particles are extracted after a few revolutions
In the first case, an operating pressure of 10
-9 
or 10
-10 
Torr is mandatory,
while in the second case 10
-6 
or 10
-7 
Torr is sufficient  ( 1 Torr= 133 Pa)
5
Cogne meeting, February 2020
The circulating beams deteriorate the initial (static) vacuum via various processes
In electron machines, the produced synchrotron radiation releases gases by
hitting the vacuum chamber surfaces
In proton machines, the degassing is due to surface bombardment by charged
particles produced and accelerated by the beam potential
 Degassing may trigger a positive feedback process, which may result in beam loss
Careful surface cleaning is mandatory!
6
Cogne meeting, February 2020
 
2. The CERN Intersecting Storage Rings (ISR)
The ISR was the world’s first hadron collider  
Fig.1. The ISR layout.
7
Cogne meeting, February 2020
The  “machine” consisted of two tangential rings of about
300 m diameter, with 8 intersections for proton-proton
collisions, surrounded by detectors
 
The energy of the (continuous) beams was 25 -28 GeV,
and the final beam intensity was more than 30 A
8
Cogne meeting, February 2020
2.1. The ISR vacuum
Initially, pumping was done by means of mechanical rotary pumps and
turbomolecular pumps, followed by 
sputter-ion pumps 
(350 units, each with a
pumping speed of about 350 l s
-1
)
The achieved 
pressure was in the 10
-10 
Torr range
, an order of magnitude better
than specified. However, in the presence of circulating beams, the vacuum was
spoilt by “
pressure bumps
”, due to ion bombardment of the vacuum chamber
surfaces. This severely limited the beam current.
The problem was cured by adding about 700 Titanium sublimation pumps, and a
careful surface cleaning by use of an Argon-Oxygen plasma followed by in-situ
baking at 300°C
After these improvements, average pressure was in the low 10
-12 
Torr
9
Cogne meeting, February 2020
The operating principles of the sputter-ion pump (and of the titanium
sublimation) pumps are illustrated in the figure below (Fig. 2)
10
 Fig. 2. Schematic view of the sputter-ion pump.
Cogne meeting, February 2020
The pump consists basically of two Ti (or Ti-Ta) plates at ground potential
(cathodes) in an external magnetic field (of the order of 1000 gauss).
A glow discharge is triggered by applying a positive potential (typically 5 kV) to an
array of small cylinders, where the electrons ionize the residual gas.
The ions repelled by the positive potential bombard the Ti plates and extract Ti
atoms, which produce a pumping coating on the surrounding surfaces.
The function of the magnetic field is to provide the electrons inside the cylinders
with cyclotron orbits, which increase the electron ionisation efficiency and allow
maintaining the discharge at very low pressures.
11
Cogne meeting, February 2020
In
 the titanium sublimation pump, t
itanium is sublimated from a
filament heated at about 800°C.
 A chemically reactive film is produced, which traps the gas
molecules until finally is saturated.
To restore pumping, the sublimation process must be repeated.     
12
Cogne meeting, February 2020
 
2.2 M
easurement of pressure at the ISR
The initial pressure of 10
-10
 Torr was measured using 350 ionization
pressure gauges of the Bayard-Alpert (B-A) type.
After the ISR vacuum improvement, these gauges became inadequate and
a better gauge was needed.
13
Cogne meeting, February 2020
The B-A gauge, developed in the 1950s, had improved the low pressure
measuring limit by two orders of magnitude, but, according to Alpert himself
(Encyclopaedia of Physics,  Springer-Verlag, vol. 12, 624, 1958) it could not be
used for pressures in the 10
-12 
Torr range, such as those achieved in the ISR.
Other gauges could have been chosen, but, in this case, not only the gauge
heads, but also the power supplies would have had to be replaced, with an
important additional cost.
It was therefore decided to carefully analyse the causes of this apparent low-
pressure limitation, hoping to make the B-A gauge compatible with the new
measuring requirements.
14
Cogne meeting, February 2020
15
Fig 3 shows the standard design of the B-A gauge. Electrons are emitted
by heating a tungsten filament at about 2000°C and are accelerated by
the grid (kept at a positive potential about 150V higher than that of the
filament).
Since the grid is quite “transparent”, before landing on the grid the
electrons cross the grid volume a few times and produce ions, which are
then collected by the central collector.
The resulting ion collector current is proportional, for a given gas, to the
gas density (pressure).
Cogne meeting, February 2020
16
Fig. 3. Bayard-Alpert pressure gauge.
Cogne meeting, February 2020
17
This process looks very simple, but there is a problem. By hitting the grid, the electrons
produce x-rays, some of which reach the ion collector and extract photoelectrons.
An electron current leaving the collector mimics a current of collected ions and the
collector current does not correspond any more to the gas density to be measured.
Since the X-Ray current is pressure independent, the problem becomes particularly
serious when the pressure becomes very low. Although the X-Ray current could be
reduced by thinning the collector, below a certain thickness, Alpert claimed, the ion
collection efficiency would be equally reduced, and the benefit of a very thin collector
would be lost.
The development work carried out at the ISR showed that this statement is wrong.
Cogne meeting, February 2020
18
Fig. 4. B-A gauge sensitivity as a function of the diameter of the ion collector.
Triangles: open grid
Dots: closed grid
Cogne meeting, February 2020
19
In fact, the ion collection efficiency remains constant even for very thin
collectors, provided the grid is properly closed. In this case, the ions cannot
escape, and finally they are collected.
The B-A gauge was further improved by enlarging the grid diameter (from
typically 25 mm to 36mm). A larger grid increases the ions production
(longer path inside the grid volume) and further reduces the X-Ray current
(larger grid to collector distance).
Thanks to this work, about 500 B-A gauges able to measure 10
-12
 Torr were
purchased and 350 of them were installed in the ISR.
Cogne meeting, February 2020
20
2.3 Pumping the ISR intersections
 
To reduce the background in the experiments, pressures of 10
-13
 or even
lower were requested for vacuum pipes at the ISR intersections
 At that time (1960s) it was generally believed that these extreme pressures
could only be achieved by cryo-pumping (i.e. by condensing the residual
gases on a surface kept at liquid helium temperature)
However, studies carried out at CERN and in other laboratories showed an
unexpected limitation of hydrogen vapour pressure, which could not be
decreased to below 10
-10 
Torr, irrespective of the condensation temperature.
Cogne meeting, February 2020
21
Fig. 5. The measured hydrogen vapour pressure.
Cogne meeting, February 2020
22
The influence of the condensing
surface material was explored at
CERN by means of a dedicated
cryostat to allow its easy
replacement (see Fig.6).
Fig. 6. Test cryostat.
Cogne meeting, February 2020
23
The result of this study clearly
showed that the anomalous
vapour pressure only depends on
the total amount of thermal
radiation absorbed, and not on
other properties of the tested
materials (see Fig. 7)
Fig. 7. 
Influence of the condensing surface on the hydrogen pressure
.
Cogne meeting, February 2020
24
The reason for the anomalous  hydrogen behaviour was found to be a special
property of this particular element. Hydrogen is the only existing material for which
the Debye phonon (the highest energy phonon in any given material) carries more
energy than needed to desorb a molecule.
The absorbed radiation produces phonons in the underlying surface. These phonons
are transmitted to the hydrogen condensate, which allows Debye phonons to reach
the hydrogen surface and desorb molecules.
All gases heavier than hydrogen have lower energy Debye phonons. Therefore, a
few monolayers of nitrogen or argon interposed between the metal surface and the
hydrogen film will prevent the transmission of the detrimental phonons and remove
the hydrogen vapour pressure anomaly.
This effect was confirmed experimentally, opening the way to ISR applications.
Cogne meeting, February 2020
25
2.4 Cryopumping applications for the ISR
A important practical consequence of the described study was to minimize
the radiation load onto the condensation surface – which also served to
decrease the consumption of liquid He.
This resulting design is shown in Fig. 8
Cogne meeting, February 2020
26
The cryo-surface is shielded by a
chevron baffle cooled by liquid
nitrogen and coated by an infrared
“black” film, so as to transmit less
than 10
-3 
of the room temperature
thermal radiation.
The cryo-surface is silver coated, to
reflect about 99% of the transmitted
radiation.
Fig. 8. Design of the ISR cryo-pump.
Cogne meeting, February 2020
27
Two large cryo-pumps were installed
at ISR intersection 6 (Fig. 9), where
they produced a vacuum of about
2x10
-13 
Torr.
Fig. 9. Cryo-pumps in the ISR.
Cogne meeting, February 2020
28
One of these cryo-pumps is
shown in Fig. 10, during its
assembly.
Fig. 10. Cryo-pump during assembly.
Cogne meeting, February 2020
29
Four smaller cryo-pumps of this type were also installed at ISR intersection 8.
A practical problem with cryopumping is that the liquid helium should be
periodically refilled, and this can disturb the machine operation. For the
cryopump model shown in Fig. 8, operation without helium refilling was
possible for two weeks, but a longer time interval would have been preferred.
For this reason the cryopump design was modified by adding an external shield
connected to the liquid helium exhaust pipe and cooled by the recovered cold
gas (see Fig. 11).
The new design was adopted for the 4 smaller cryo-pumps which were installed
at intersection 8 (see Fig. 12). In this case, 11 litres of liquid helium provided
undisturbed operation for 200 days.
Cogne meeting, February 2020
30
Low loss cryo-pump design,
with an external shield
connected to the liquid
helium exhaust pipe.
Fig. 11. Low loss cryo-pump.
Cogne meeting, February 2020
31
Small cryostat with reduced
helium consumption.
Fig. 11. Small low-loss cryostat.
Cogne meeting, February 2020
Installation for testing the
cryo-pumps to be installed
at ISR point 8.
32
Fig. 13. Setup for testing the cryo-pumps for intersection 8.
Cogne meeting, February 2020
 
2.5 Pressure measurements
    
for the ISR intersections 
Due to the intrinsic X-ray limitation of the B-A gauge, various alternative
designs had been proposed and developed in many laboratories.
The common feature of these designs was an ion collector external to the
grid volume, so as to be less exposed to the detrimental X-rays.
The ions were then driven to the collector by electric fields. An example of
the external collector gauge is given in Fig. 14.
33
Cogne meeting, February 2020
34
Fig. 14. Schematic view of an external collector gauge
.
Cogne meeting, February 2020
35
Fig. 15. Diagram of a Helmer gauge.
Cogne meeting, February 2020
Among the gauges of this type commercially
available, a model developed by Helmer was
equipped with a power supply allowing
measurements down to 10
-13 
Torr .
In this gauge the ions extracted from the grid
are deflected by an electrostatic field so as to
reach a fully shielded collector (see Fig. 15).
However, the extremely low pressures achieved for the ISR revealed
another, unexpected, limitation in the low 10
-12 
Torr range, due to
sublimation of tungsten atoms from the gauge filament at the operating
temperature of 2000°C.
By coating the filament with thoria it was possible to decrease this
temperature to about 1000°C , which removed this limitation (see Fig. 15).
The gauge sensitivity was then increased by enlarging the grid diameter,
and with this improved Helmer gauge it became possible to measure
down to the low 10
-14 
Torr range, the lowest pressure ever measured to
this day.
36
Fig. 15. Improved Helmer gauge.
Cogne meeting, February 2020
37
In Fig. 16 we see the evolution of ultimate
achieved vacuum from 1900 to the
present day.
References to experiments are as follows:
- Gaede (1905, 1913);
- Sherwood ((1918);
- Bayard and Alpert (1950);
- Venema (1958);
- Davis (1962);
- Hobson (1964);
- Benvenuti ( 1977, 1979, 1993).
Fig. 16. Plot of achieved vacuum vs. time.
Cogne meeting, February 2020
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This presentation covers the importance of vacuum technology in particle accelerators, focusing on particle loss due to collisions with residual gas molecules and the stringent vacuum requirements for storage rings and accelerators. It discusses the impact of circulating beams on vacuum deterioration and emphasizes the need for careful surface cleaning to prevent beam loss. The lecture also highlights historical vacuum pump developments and specific accelerator examples like the CERN Intersecting Storage Rings (ISR). Overall, the talk provides valuable insights into maintaining optimal vacuum conditions in accelerator systems.

  • Vacuum Technology
  • Particle Accelerators
  • CERN
  • Storage Rings
  • Beam Loss

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  1. Vacuum technology for particle accelerators C. Benvenuti, CERN (honorary staff member) Cogne meeting, February 2020 1

  2. Lesson 1: Introduction The Intersecting Storage Rings (ISR) Lesson 2: Getter pumping The Large Electron Positron collider (LEP) The Large Hadron Collider (LHC) An alternative solution Conclusions Cogne meeting, February 2020 2

  3. Otto von Guerickes first pneumatic vacuum pump (1654) Cogne meeting, February 2020 3

  4. von Guerickes second vacuum pump (1657) Cogne meeting, February 2020 4

  5. Introduction Particles circulating in accelerators may get lost by electronic and nuclear collisions with the residual gas molecules The particle loss depends on the interaction cross sections for the different gases and on gas densities The vacuum requirements are more stringent for storage rings, where the particles are kept circulating for hours or days, than for accelerators, where the particles are extracted after a few revolutions In the first case, an operating pressure of 10-9 or 10-10 Torr is mandatory, while in the second case 10-6 or 10-7 Torr is sufficient ( 1 Torr= 133 Pa) Cogne meeting, February 2020 5

  6. The circulating beams deteriorate the initial (static) vacuum via various processes In electron machines, the produced synchrotron radiation releases gases by hitting the vacuum chamber surfaces In proton machines, the degassing is due to surface bombardment by charged particles produced and accelerated by the beam potential Degassing may trigger a positive feedback process, which may result in beam loss Careful surface cleaning is mandatory! Cogne meeting, February 2020 6

  7. 2. The CERN Intersecting Storage Rings (ISR) The ISR was the world s first hadron collider Fig.1. The ISR layout. Cogne meeting, February 2020 7

  8. The machine consisted of two tangential rings of about 300 m diameter, with 8 intersections for proton-proton collisions, surrounded by detectors The energy of the (continuous) beams was 25 -28 GeV, and the final beam intensity was more than 30 A Cogne meeting, February 2020 8

  9. 2.1. The ISR vacuum Initially, pumping was done by means of mechanical rotary pumps and turbomolecular pumps, followed by sputter-ion pumps (350 units, each with a pumping speed of about 350 l s-1) The achieved pressure was in the 10-10 Torr range, an order of magnitude better than specified. However, in the presence of circulating beams, the vacuum was spoilt by pressure bumps , due to ion bombardment of the vacuum chamber surfaces. This severely limited the beam current. The problem was cured by adding about 700 Titanium sublimation pumps, and a careful surface cleaning by use of an Argon-Oxygen plasma followed by in-situ baking at 300 C After these improvements, average pressure was in the low 10-12 Torr Cogne meeting, February 2020 9

  10. The operating principles of the sputter-ion pump (and of the titanium sublimation) pumps are illustrated in the figure below (Fig. 2) Fig. 2. Schematic view of the sputter-ion pump. Cogne meeting, February 2020 10

  11. The pump consists basically of two Ti (or Ti-Ta) plates at ground potential (cathodes) in an external magnetic field (of the order of 1000 gauss). A glow discharge is triggered by applying a positive potential (typically 5 kV) to an array of small cylinders, where the electrons ionize the residual gas. The ions repelled by the positive potential bombard the Ti plates and extract Ti atoms, which produce a pumping coating on the surrounding surfaces. The function of the magnetic field is to provide the electrons inside the cylinders with cyclotron orbits, which increase the electron ionisation efficiency and allow maintaining the discharge at very low pressures. Cogne meeting, February 2020 11

  12. In the titanium sublimation pump, titanium is sublimated from a filament heated at about 800 C. A chemically reactive film is produced, which traps the gas molecules until finally is saturated. To restore pumping, the sublimation process must be repeated. Cogne meeting, February 2020 12

  13. 2.2 Measurement of pressure at the ISR The initial pressure of 10-10 Torr was measured using 350 ionization pressure gauges of the Bayard-Alpert (B-A) type. After the ISR vacuum improvement, these gauges became inadequate and a better gauge was needed. Cogne meeting, February 2020 13

  14. The B-A gauge, developed in the 1950s, had improved the low pressure measuring limit by two orders of magnitude, but, according to Alpert himself (Encyclopaedia of Physics, Springer-Verlag, vol. 12, 624, 1958) it could not be used for pressures in the 10-12 Torr range, such as those achieved in the ISR. Other gauges could have been chosen, but, in this case, not only the gauge heads, but also the power supplies would have had to be replaced, with an important additional cost. It was therefore decided to carefully analyse the causes of this apparent low- pressure limitation, hoping to make the B-A gauge compatible with the new measuring requirements. Cogne meeting, February 2020 14

  15. Fig 3 shows the standard design of the B-A gauge. Electrons are emitted by heating a tungsten filament at about 2000 C and are accelerated by the grid (kept at a positive potential about 150V higher than that of the filament). Since the grid is quite transparent , before landing on the grid the electrons cross the grid volume a few times and produce ions, which are then collected by the central collector. The resulting ion collector current is proportional, for a given gas, to the gas density (pressure). Cogne meeting, February 2020 15

  16. Fig. 3. Bayard-Alpert pressure gauge. Cogne meeting, February 2020 16

  17. This process looks very simple, but there is a problem. By hitting the grid, the electrons produce x-rays, some of which reach the ion collector and extract photoelectrons. An electron current leaving the collector mimics a current of collected ions and the collector current does not correspond any more to the gas density to be measured. Since the X-Ray current is pressure independent, the problem becomes particularly serious when the pressure becomes very low. Although the X-Ray current could be reduced by thinning the collector, below a certain thickness, Alpert claimed, the ion collection efficiency would be equally reduced, and the benefit of a very thin collector would be lost. The development work carried out at the ISR showed that this statement is wrong. Cogne meeting, February 2020 17

  18. Triangles: open grid Dots: closed grid Fig. 4. B-A gauge sensitivity as a function of the diameter of the ion collector. Cogne meeting, February 2020 18

  19. In fact, the ion collection efficiency remains constant even for very thin collectors, provided the grid is properly closed. In this case, the ions cannot escape, and finally they are collected. The B-A gauge was further improved by enlarging the grid diameter (from typically 25 mm to 36mm). A larger grid increases the ions production (longer path inside the grid volume) and further reduces the X-Ray current (larger grid to collector distance). Thanks to this work, about 500 B-A gauges able to measure 10-12 Torr were purchased and 350 of them were installed in the ISR. Cogne meeting, February 2020 19

  20. 2.3 Pumping the ISR intersections To reduce the background in the experiments, pressures of 10-13 or even lower were requested for vacuum pipes at the ISR intersections At that time (1960s) it was generally believed that these extreme pressures could only be achieved by cryo-pumping (i.e. by condensing the residual gases on a surface kept at liquid helium temperature) However, studies carried out at CERN and in other laboratories showed an unexpected limitation of hydrogen vapour pressure, which could not be decreased to below 10-10 Torr, irrespective of the condensation temperature. Cogne meeting, February 2020 20

  21. Fig. 5. The measured hydrogen vapour pressure. Cogne meeting, February 2020 21

  22. The influence of the condensing surface material was explored at CERN by means of a dedicated cryostat to allow its easy replacement (see Fig.6). Fig. 6. Test cryostat. Cogne meeting, February 2020 22

  23. The result of this study clearly showed that the anomalous vapour pressure only depends on the total amount of thermal radiation absorbed, and not on other properties of the tested materials (see Fig. 7) Fig. 7. Influence of the condensing surface on the hydrogen pressure. Cogne meeting, February 2020 23

  24. The reason for the anomalous hydrogen behaviour was found to be a special property of this particular element. Hydrogen is the only existing material for which the Debye phonon (the highest energy phonon in any given material) carries more energy than needed to desorb a molecule. The absorbed radiation produces phonons in the underlying surface. These phonons are transmitted to the hydrogen condensate, which allows Debye phonons to reach the hydrogen surface and desorb molecules. All gases heavier than hydrogen have lower energy Debye phonons. Therefore, a few monolayers of nitrogen or argon interposed between the metal surface and the hydrogen film will prevent the transmission of the detrimental phonons and remove the hydrogen vapour pressure anomaly. This effect was confirmed experimentally, opening the way to ISR applications. Cogne meeting, February 2020 24

  25. 2.4 Cryopumping applications for the ISR A important practical consequence of the described study was to minimize the radiation load onto the condensation surface which also served to decrease the consumption of liquid He. This resulting design is shown in Fig. 8 Cogne meeting, February 2020 25

  26. The cryo-surface is shielded by a chevron baffle cooled by liquid nitrogen and coated by an infrared black film, so as to transmit less than 10-3 of the room temperature thermal radiation. The cryo-surface is silver coated, to reflect about 99% of the transmitted radiation. Fig. 8. Design of the ISR cryo-pump. Cogne meeting, February 2020 26

  27. Two large cryo-pumps were installed at ISR intersection 6 (Fig. 9), where they produced a vacuum of about 2x10-13 Torr. Fig. 9. Cryo-pumps in the ISR. Cogne meeting, February 2020 27

  28. One of these cryo-pumps is shown in Fig. 10, during its assembly. Fig. 10. Cryo-pump during assembly. Cogne meeting, February 2020 28

  29. Four smaller cryo-pumps of this type were also installed at ISR intersection 8. A practical problem with cryopumping is that the liquid helium should be periodically refilled, and this can disturb the machine operation. For the cryopump model shown in Fig. 8, operation without helium refilling was possible for two weeks, but a longer time interval would have been preferred. For this reason the cryopump design was modified by adding an external shield connected to the liquid helium exhaust pipe and cooled by the recovered cold gas (see Fig. 11). The new design was adopted for the 4 smaller cryo-pumps which were installed at intersection 8 (see Fig. 12). In this case, 11 litres of liquid helium provided undisturbed operation for 200 days. Cogne meeting, February 2020 29

  30. Low loss cryo-pump design, with an external shield connected to the liquid helium exhaust pipe. Fig. 11. Low loss cryo-pump. Cogne meeting, February 2020 30

  31. Small cryostat with reduced helium consumption. Fig. 11. Small low-loss cryostat. Cogne meeting, February 2020 31

  32. Installation for testing the cryo-pumps to be installed at ISR point 8. Fig. 13. Setup for testing the cryo-pumps for intersection 8. Cogne meeting, February 2020 32

  33. 2.5 Pressure measurements for the ISR intersections Due to the intrinsic X-ray limitation of the B-A gauge, various alternative designs had been proposed and developed in many laboratories. The common feature of these designs was an ion collector external to the grid volume, so as to be less exposed to the detrimental X-rays. The ions were then driven to the collector by electric fields. An example of the external collector gauge is given in Fig. 14. Cogne meeting, February 2020 33

  34. Fig. 14. Schematic view of an external collector gauge. Cogne meeting, February 2020 34

  35. Among the gauges of this type commercially available, a model developed by Helmer was equipped with a power supply allowing measurements down to 10-13 Torr . In this gauge the ions extracted from the grid are deflected by an electrostatic field so as to reach a fully shielded collector (see Fig. 15). Fig. 15. Diagram of a Helmer gauge. Cogne meeting, February 2020 35

  36. However, the extremely low pressures achieved for the ISR revealed another, unexpected, limitation in the low 10-12 Torr range, due to sublimation of tungsten atoms from the gauge filament at the operating temperature of 2000 C. By coating the filament with thoria it was possible to decrease this temperature to about 1000 C , which removed this limitation (see Fig. 15). The gauge sensitivity was then increased by enlarging the grid diameter, and with this improved Helmer gauge it became possible to measure down to the low 10-14 Torr range, the lowest pressure ever measured to this day. Fig. 15. Improved Helmer gauge. Cogne meeting, February 2020 36

  37. In Fig. 16 we see the evolution of ultimate achieved vacuum from 1900 to the present day. References to experiments are as follows: - Gaede (1905, 1913); - Sherwood ((1918); - Bayard and Alpert (1950); - Venema (1958); - Davis (1962); - Hobson (1964); - Benvenuti ( 1977, 1979, 1993). Fig. 16. Plot of achieved vacuum vs. time. Cogne meeting, February 2020 37

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