Understanding Ion Pumps and High Vacuum Systems

Explore the world of ion pumps and high vacuum systems, including the importance of creating a good vacuum, the different types of pumps available, the significance of ultra-high vacuum environments, and the features of ion pumps. Discover the technologies and processes involved, from chemisorption to electrical attraction, in maintaining efficient operations in high vacuum conditions.

• Ion Pumps
• High Vacuum
• Ultra-High Vacuum
• Vacuum Systems
• Vacuum Technology

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Uploaded on Sep 16, 2024 | 0 Views

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1. ION PUMPS By: Nima Moghimian

2. Why pump? Why vacuum? What is a good vacuum?

3. What is a good vacuum? Ultra High Vacuum (UHV) NO Vacuum Rough Vacuum Low Vacuum High Vacuum (HV) Pa 1Pa = 7.5 x 10-3 Torr

4. Types of pumps Ion pumps Turbomolecular pumps Diffusion pumps Rotary and Dry pumps Ultra High Vacuum (UHV) Rough Vacuum NO Vacuum Low Vacuum High Vacuum (HV) Pa

5. SEM pumps 10-8Pa 105 Pa 10-4Pa 10-1Pa

6. Ion pump anode Ti Ti N S + DC Power supply _

7. Ion pump + + + + + + + + + + + - - - - - - - - - - - - e e N S e e e e + + + + + + + + + + + + DC Power supply _

8. + + + + + + + + e + _ _ _ _ _ _ 1. Collision 2. Ionization 3. Sputtering 4. Condensation e +

9. Chemisorption N S Electrical attraction + DC Power supply _

10. _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ + + + + + + + + + + + + + + e + + N S e + + + + + + + + + + + + + + + DC Power supply _

11. Ion pump features No Oil No moving parts Only efficient at high vacuums

12. Questions