Atom Probe Sample Request Details and Instructions
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Instructions for this form:
This is a starting point to discuss the technical details and goals of an atom probe sample request. After
filling out the web form with your contact details, please tell us more about your application .This example
slide deck can be used to upload details about your sample that will help us determine feasibility of the
sample analysis. Our preference is for the CAMECA technical experts to discuss the application directly
with the customer. Details provided here can form a strong basis for this discussion and help the process
go smoothly. Thank you.
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Please provide instructions for identifying the feature(s) of interest.
Samples with significant voids may not be compatible with LEAP.
For proposed demos that require a comparison between samples, please describe the differences you would like demonstrated.
From this DRF, we will evaluate the amount of time and effort required to process received samples, acquire data and generate a
report. It is critical that you provide images and description so that it is obvious to anyone exactly
what will be sent
and
what is
expected
as part of the demo. We need to know the primary composition of each layer type (what is above, below, and next to the
region of interest) to evaluate possible specimen preparation strategies and overall feasibility for success.
Note, submission of a demo request form (DRF) does not indicate acceptance of the request from the APT Technology Center.
Technical feasibility needs to be reviewed first.
23 September 2024
CAMECA Demo Request Details
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Full description of sample (if
devic
e structure, please
include labeled diagram with
dimensions as much as
possible)
•
Size of wafer/approximate
size of sample that can be
sent to CAMECA
•
Include markings to which
side is “up”
23 September 2024
CAMECA Demo Request Details
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Include any relevant optical
microcopy/SEM/TEM images
of the specimen, indicating the
region of interest if possible
•
Please include scale bars
•
Note: if this is a device sample,
please include detailed
information to help us identify
the region of interest!
23 September 2024
CAMECA Demo Request Details
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Comparisons that need to be made?
•
Example: compare carbon grain
boundary segregation for annealed and
unannealed samples
•
Elements interested in detecting?
•
Example: Interested in As implant
profile
•
Approximate concentration of
elements?
•
Example: 0.5% peak implant
concentration 50 nm from top surface
•
Type of analysis desired?
•
Example: bulk composition of 20 nm
region after peak implant, 1D profile of
As and Si.
23 September 2024
CAMECA Demo Request Details
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Please use as many additional slides as needed to describe your sample,
region of interest location, goals of the demo.
•
Correlative microscopy (SIMS profiles, images) can be added here
•
Results of previous APT analyses can be included here
•
Examples of other useful information include any publications or references
that would be helpful to the technical team at CAMECA
23 September 2024
CAMECA Demo Request Details
5
This detailed guide provides instructions and recommendations for submitting a sample request for atom probe analysis. It includes information on how to describe the sample, provide images, and outline the goals of the analysis. By following these guidelines, customers can facilitate discussions with CAMECA technical experts and enhance the efficiency of the demo request process.
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Presentation Transcript
Atom probe demo request details Instructions for this form: This is a starting point to discuss the technical details and goals of an atom probe sample request. After filling out the web form with your contact details, please tell us more about your application .This example slide deck can be used to upload details about your sample that will help us determine feasibility of the sample analysis. Our preference is for the CAMECA technical experts to discuss the application directly with the customer. Details provided here can form a strong basis for this discussion and help the process go smoothly. Thank you. Additional notes: Please do not assume that CAMECA is an expert in your field. The more information and context you can provide, the better and faster the demo. Please provide instructions for identifying the feature(s) of interest. Samples with significant voids may not be compatible with LEAP. For proposed demos that require a comparison between samples, please describe the differences you would like demonstrated. From this DRF, we will evaluate the amount of time and effort required to process received samples, acquire data and generate a report. It is critical that you provide images and description so that it is obvious to anyone exactly what will be sent and what is expected as part of the demo. We need to know the primary composition of each layer type (what is above, below, and next to the region of interest) to evaluate possible specimen preparation strategies and overall feasibility for success. Note, submission of a demo request form (DRF) does not indicate acceptance of the request from the APT Technology Center. Technical feasibility needs to be reviewed first. 1 CAMECA Demo Request Details 23 September 2024
Slide 1: Description of sample Full description of sample (if device structure, please include labeled diagram with dimensions as much as possible) Size of wafer/approximate size of sample that can be sent to CAMECA Include markings to which side is up 2 CAMECA Demo Request Details 23 September 2024
Slide 2: Optical/SEM/TEM/EBSD images Include any relevant optical microcopy/SEM/TEM images of the specimen, indicating the region of interest if possible Please include scale bars Note: if this is a device sample, please include detailed information to help us identify the region of interest! 3 CAMECA Demo Request Details 23 September 2024
Slide 3: Goals of APT sample analysis Comparisons that need to be made? Example: compare carbon grain boundary segregation for annealed and unannealed samples Elements interested in detecting? Example: Interested in As implant profile Approximate concentration of elements? Example: 0.5% peak implant concentration 50 nm from top surface Type of analysis desired? Example: bulk composition of 20 nm region after peak implant, 1D profile of As and Si. 4 CAMECA Demo Request Details 23 September 2024
Slide 4+: Any Additional information Please use as many additional slides as needed to describe your sample, region of interest location, goals of the demo. Correlative microscopy (SIMS profiles, images) can be added here Results of previous APT analyses can be included here Examples of other useful information include any publications or references that would be helpful to the technical team at CAMECA 5 CAMECA Demo Request Details 23 September 2024
